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SV62-D
The SV62-D valve is specifically designed for precise dispensing of low to medium viscosity fluids such as resist materials. SV62-D has the ability to rapidly obtain maximum flow rates which reduce turbulence and the formation of bubbles.
Specifications:
| Size | Ø26.9mm (Fluid body) × 77.7mm length |
| Weight | 212g |
| Air Cylinder Body | SUS303 |
| Diaphgram | UHMW* |
| Valve head | SUS303 |
| Fluid outlet port | 1/8NPT female |
| Mounting hole | M5 female |
| Valve operating air pressure | 0.4 ~ 0.62MPa |
| mMaximum fluid pressure | 0.48MPa |